SpinCoater

 Hotplate

 

 
   - SM-180, TSM 180 ( wafers up to 6" or 
     substrates up to 5¡±x 5¡± (127x 127mm).
      ( More information about SM-180-BT )
      ( More information about TSM-180-BT )
 
   - LSM-200 (wafers up to 6¡±or substrates up 
     to 5¡±x 5¡±(127 x 127mm).  
     ( More information about LSM-200 )
 
   - LSM-600 (substrates up to 15¡±x 16¡± )
     ( More information about LSM-600 )

 

 

 

 

 

 

 

 

 

   - HP-150 ( More information about HP-150 )
 
   - HP-160 ( More information about HP-160 )
 
   - HP-160-700 ( For more informations about HP-160-700 )
 
   - HP-200 ( More information about HP-200 )
 
   - HP-401 ( More information about HP-401 )
 
   - HP-200-Z-HMDS( More information about HP-200-Z-HMDS )
 
   - HP-401-Z( More information about HP-401-Z )
 
   - SBM-500 ( More information about SBM-500 )

 

 

Homepage : http://www.sawatec.com  

 

 Developer   /   Spin and Rins Dryer

   Cluster System 4

 

   Dveloper
 
     - LRD 250 ( More information about LRD-250 )
 
  Spin and Rins Dryer
 
     - RD 150 ( More information about RD-150 )
 

 

 

 

 

   

  The SCS-4 is a fully programmable 
  cassette-to cassette system. 
  It can be equipped with the modules as
  coater, cleaner, developper, 
  HMDS-hotplates, hotplates and coolplates
  for wafer sizes up to 8" and substrates 
  up to 6" x 6". 
  The SCS-4 is equipped with a central 
  positioned 3-axis field approved high 
  speed robot.

 

 

Homepage : http://www.sawatec.com