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E-beam lithography System, FIB,EBID, attachment solution for SEM / FIB lithogrphy by Raith |
Production Tools, SOI Technology, Plasma Activation, Nano Cleave Tool By Sigen
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Spin/ Spray Coater, Dryer, Hot/cool Plate, Pump By SAWATEC |
Plasma Photoresist Strip / Descum, Cleaning Systems, Vacuum Bake/Vapor Prime, Image Reversal Tools, Chemical Vapor Deposition Systems, High Temperature Vacuum Cure Ovens By Yield Engineering Systems |
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Photoresist, Chemical By All resist |
NanoImprint, Mask Aligner, SpinCaoter, Hotplate, Foundry Service, Materials By EXATECH
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